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Atualizado em 13/05/2026 · De todos da iMusic
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![Cover for Stephanus Buttgenbach · Design and Manufacturing of Active Microsystems - Microtechnology and MEMS (Paperback Book) [2011 edition] (2014)](https://imusic.b-cdn.net/images/item/original/383/9783642267383.jpg?stephanus-buttgenbach-2014-design-and-manufacturing-of-active-microsystems-microtechnology-and-mems-paperback-book&class=scaled&v=1603990462)
![Cover for Stephanus Buttgenbach · Mikromechanik: Einfuhrung in Technologie Und Anwendungen - Angewandte Physik (Paperback Book) [German, 1991 edition] (1990)](https://imusic.b-cdn.net/images/item/original/713/9783519030713.jpg?stephanus-buttgenbach-1990-mikromechanik-einfuhrung-in-technologie-und-anwendungen-angewandte-physik-paperback-book&class=scaled&v=1521414230)